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    Effect of nitrogen content on phase configuration, nanostructure and mechanical behaviors in magnetron sputtered SiCxNy thin films

    New search for: Wang, J. P.
    New search for: Lu, Y. H.
    New search for: Shen, Y. G.

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    Effect of nitrogen content on phase configuration, nanostructure and mechanical behaviors in magnetron sputtered SiCxNy thin films

    New search for: Wang, J. P.
    New search for: Lu, Y. H.
    New search for: Shen, Y. G.

    Access

    Access via TIB
    Check availability in my library
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    Effect of nitrogen content on phase configuration, nanostructure and mechanical behaviors in magnetron sputtered SiCxNy thin films

    New search for: Wang, J. P.
    New search for: Lu, Y. H.
    New search for: Shen, Y. G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
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    Document information
    Title:

    Effect of nitrogen content on phase configuration, nanostructure and mechanical behaviors in magnetron sputtered SiCxNy thin films

    Contributors:

    Wang, J. P. (author) / Lu, Y. H. (author) / Shen, Y. G. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 256 ; 1955-1960

    Publication date:

    2010-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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