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    The effect of nitrogen on the chemistry of sputter-deposited SiCxNy films

    New search for: Alizadeh, Z.
    New search for: Sundaram, K. B.
    New search for: Seal, S.

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    The effect of nitrogen on the chemistry of sputter-deposited SiCxNy films

    New search for: Alizadeh, Z.
    New search for: Sundaram, K. B.
    New search for: Seal, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    The effect of nitrogen on the chemistry of sputter-deposited SiCxNy films

    New search for: Alizadeh, Z.
    New search for: Sundaram, K. B.
    New search for: Seal, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    The effect of nitrogen on the chemistry of sputter-deposited SiCxNy films

    Contributors:

    Alizadeh, Z. (author) / Sundaram, K. B. (author) / Seal, S. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 183 ; 270-277

    Publication date:

    2001-01-01

    Size:

    8 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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