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Ceramic Target Materials for Sputtering Applications
Ceramic Target Materials for Sputtering Applications
Ceramic Target Materials for Sputtering Applications
Simons, C. (author) / Kastner, A. (author) / Kiriakidis, G. (author) / Chandra, T. / Wanderka, N. / Reimers, W. / Ionescu, M.
2010-01-01
7 pages
Article (Journal)
English
DDC:
620.11
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CERAMIC FILM, SPUTTERING TARGET, AND METHOD FOR PRODUCING SPUTTERING TARGET
European Patent Office | 2019
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