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Doping Concentration and Surface Morphology of 4H-SiC C-Face Epitaxial Growth
Doping Concentration and Surface Morphology of 4H-SiC C-Face Epitaxial Growth
Doping Concentration and Surface Morphology of 4H-SiC C-Face Epitaxial Growth
Lee, K.Y. (author) / Lee, S.Y. (author) / Huang, C.F. (author) / Bauer, A.J. / Friedrichs, P. / Krieger, M. / Pensl, G. / Rupp, R. / Seyller, T.
2010-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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