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    Hybrid plasma bonding of germanium and glass wafers at low temperature

    New search for: Howlader, M. M.
    New search for: Kibria, M. G.
    New search for: Zhang, F.

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    Hybrid plasma bonding of germanium and glass wafers at low temperature

    New search for: Howlader, M. M.
    New search for: Kibria, M. G.
    New search for: Zhang, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Hybrid plasma bonding of germanium and glass wafers at low temperature

    New search for: Howlader, M. M.
    New search for: Kibria, M. G.
    New search for: Zhang, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
    Title:

    Hybrid plasma bonding of germanium and glass wafers at low temperature

    Contributors:

    Howlader, M. M. (author) / Kibria, M. G. (author) / Zhang, F. (author)

    Published in:

    MATERIALS LETTERS ; 64 ; 1532-1535

    Publication date:

    2010-01-01

    Size:

    4 pages

    ISSN:

    0167-577X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1105 / 530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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