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    Effect of light germanium doping on thermal donors in Czochralski silicon wafers

    New search for: Cui, C.
    New search for: Yang, D.
    New search for: Ma, X.
    New search for: Li, M.
    New search for: Que, D.

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    Effect of light germanium doping on thermal donors in Czochralski silicon wafers

    New search for: Cui, C.
    New search for: Yang, D.
    New search for: Ma, X.
    New search for: Li, M.
    New search for: Que, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of light germanium doping on thermal donors in Czochralski silicon wafers

    New search for: Cui, C.
    New search for: Yang, D.
    New search for: Ma, X.
    New search for: Li, M.
    New search for: Que, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Effect of light germanium doping on thermal donors in Czochralski silicon wafers

    Contributors:

    Cui, C. (author) / Yang, D. (author) / Ma, X. (author) / Li, M. (author) / Que, D. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 110-113

    Publication date:

    2006-01-01

    Size:

    4 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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