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Influence of the Sputtering Pressure on the Properties of TAZO Films Prepared by DC Magnetron Sputtering
Influence of the Sputtering Pressure on the Properties of TAZO Films Prepared by DC Magnetron Sputtering
Influence of the Sputtering Pressure on the Properties of TAZO Films Prepared by DC Magnetron Sputtering
Liu, H.F. (author) / Yuan, C.K. (author) / Huang, Y.M.
2011-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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