Dependence of resistivity on structure and composition of AZO films fabricated by ion beam co-sputtering deposition: Fid-Bau Portal

Dependence of resistivity on structure and composition of AZO films fabricated by ion beam co-sputtering deposition

Chen, Y. Y. / Hsu, J. C. / Wang, P. W. / Pai, Y. W. / Wu, C. Y. / Lin, Y. H.

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Dependence of resistivity on structure and composition of AZO films fabricated by ion beam co-sputtering deposition

Chen, Y. Y. / Hsu, J. C. / Wang, P. W. / Pai, Y. W. / Wu, C. Y. / Lin, Y. H.

Dependence of resistivity on structure and composition of AZO films fabricated by ion beam co-sputtering deposition

Chen, Y. Y. / Hsu, J. C. / Wang, P. W. / Pai, Y. W. / Wu, C. Y. / Lin, Y. H.

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Document information

Title:

Dependence of resistivity on structure and composition of AZO films fabricated by ion beam co-sputtering deposition

Contributors:

Chen, Y. Y. (author) / Hsu, J. C. (author) / Wang, P. W. (author) / Pai, Y. W. (author) / Wu, C. Y. (author) / Lin, Y. H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 257 ; 3446-3450

Publication date:

2011-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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