Dependence of resistivity on structure and composition of AZO films fabricated by ion beam co-sputtering deposition: Fid-Bau Portal

Dependence of resistivity on structure and composition of AZO films fabricated by ion beam co-sputtering deposition

Chen, Y. Y. / Hsu, J. C. / Wang, P. W. / Pai, Y. W. / Wu, C. Y. / Lin, Y. H.

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Dependence of resistivity on structure and composition of AZO films fabricated by ion beam co-sputtering deposition

Chen, Y. Y. / Hsu, J. C. / Wang, P. W. / Pai, Y. W. / Wu, C. Y. / Lin, Y. H.

Dependence of resistivity on structure and composition of AZO films fabricated by ion beam co-sputtering deposition

Chen, Y. Y. / Hsu, J. C. / Wang, P. W. / Pai, Y. W. / Wu, C. Y. / Lin, Y. H.

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Titel:

Dependence of resistivity on structure and composition of AZO films fabricated by ion beam co-sputtering deposition

Beteiligte:

Chen, Y. Y. (Autor:in) / Hsu, J. C. (Autor:in) / Wang, P. W. (Autor:in) / Pai, Y. W. (Autor:in) / Wu, C. Y. (Autor:in) / Lin, Y. H. (Autor:in)

Erschienen in:

APPLIED SURFACE SCIENCE ; 257 ; 3446-3450

Erscheinungsdatum:

01.01.2011

Format / Umfang:

5 pages

ISSN:

0169-4332

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 621.35

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