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Effects of sputtering and assisting ions on the orientation of titanium nitride films fabricated by ion beam assisted sputtering deposition from metal target
Effects of sputtering and assisting ions on the orientation of titanium nitride films fabricated by ion beam assisted sputtering deposition from metal target
Effects of sputtering and assisting ions on the orientation of titanium nitride films fabricated by ion beam assisted sputtering deposition from metal target
Zhang, Linao (author) / Tong, Shuo (author) / Liu, Haonan (author) / Li, Yinglan (author) / Wang, Zhi (author)
MATERIALS LETTERS ; 171 ; 304-307
2016-01-01
4 pages
Article (Journal)
Unknown
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