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Silicon Waveguide Sidewall Smoothing by Resist Reflowing

Cai, J. / Lim, P.H. / Ishikawa, Y. / Wada, K.

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Silicon Waveguide Sidewall Smoothing by Resist Reflowing

Cai, J. / Lim, P.H. / Ishikawa, Y. / Wada, K.

Silicon Waveguide Sidewall Smoothing by Resist Reflowing

Cai, J. / Lim, P.H. / Ishikawa, Y. / Wada, K.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Silicon Waveguide Sidewall Smoothing by Resist Reflowing

Contributors:

Cai, J. (author) / Lim, P.H. (author) / Ishikawa, Y. (author) / Wada, K. (author)

Published in:

JOURNAL OF NONLINEAR OPTICAL PHYSICS AND MATERIALS ; 19 ; 801-810

Publication date:

2010-01-01

Size:

10 pages

ISSN:

0218-8635

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 540

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