Thermal stability of atomic-layer-deposited ultra-thin niobium oxide film on Si (100): Fid-Bau Portal

Thermal stability of atomic-layer-deposited ultra-thin niobium oxide film on Si (100)

Huang, Y. / Xu, Y. / Ding, S. J. / Lu, H. L. / Sun, Q. Q. / Zhang, D. W. / Chen, Z.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Thermal stability of atomic-layer-deposited ultra-thin niobium oxide film on Si (100)

Huang, Y. / Xu, Y. / Ding, S. J. / Lu, H. L. / Sun, Q. Q. / Zhang, D. W. / Chen, Z.

Thermal stability of atomic-layer-deposited ultra-thin niobium oxide film on Si (100)

Huang, Y. / Xu, Y. / Ding, S. J. / Lu, H. L. / Sun, Q. Q. / Zhang, D. W. / Chen, Z.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Thermal stability of atomic-layer-deposited ultra-thin niobium oxide film on Si (100)

Contributors:

Huang, Y. (author) / Xu, Y. (author) / Ding, S. J. (author) / Lu, H. L. (author) / Sun, Q. Q. (author) / Zhang, D. W. (author) / Chen, Z. (author)

Published in:

APPLIED SURFACE SCIENCE ; 257 ; 7305-7309

Publication date:

2011-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Dam, V.A.T. / Blauw, M.A. / Brongersma, S.H. et al. | British Library Online Contents | 2014

Thermal stability of atomic layer deposited Zr:Al mixed oxide thin films: An in situ transmission electron microscopy study

Nistor, L. C. / Richard, O. / Zhao, C. et al. | British Library Online Contents | 2005

Corrosion protection of aluminium by ultra-thin atomic layer deposited alumina coatings

Mirhashemihaghighi, Shadi / Światowska, Jolanta / Maurice, Vincent et al. | British Library Online Contents | 2016

Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces

Mattila, P. / Bosund, M. / Jussila, H. et al. | British Library Online Contents | 2014

Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces

Mattila, P. / Bosund, M. / Jussila, H. et al. | British Library Online Contents | 2014