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Structure of Ion Beam Sputtered Copper - Tungsten Film

Zeng, Y.-y. / Luo, Z.-y.

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Structure of Ion Beam Sputtered Copper - Tungsten Film

Zeng, Y.-y. / Luo, Z.-y.

Structure of Ion Beam Sputtered Copper - Tungsten Film

Zeng, Y.-y. / Luo, Z.-y.

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Document information

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Document information

Title:

Structure of Ion Beam Sputtered Copper - Tungsten Film

Contributors:

Zeng, Y.-y. (author) / Luo, Z.-y. (author)

Published in:

MATERIALS PROTECTION -WUHAN- ; 44 ; 54-55

Publication date:

2011-01-01

Size:

2 pages

ISSN:

1001-1560

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.1

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Chemical bonding of magnetron-sputtered copper on PECVD amorphous SiCOF film

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