Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Electrical Characterization of Nitrogen Implanted 3C-SiC by SSRM and C-TLM Measurements

    New search for: Song, X.
    New search for: Bazin, A.E.
    New search for: Michaud, J.F.
    New search for: Cayrel, F.
    New search for: Zielinski, M.
    New search for: Portail, M.
    New search for: Chassagne, T.
    New search for: Collard, E.
    New search for: Alquier, D.
    New search for: Monakhov, E.V.
    New search for: Hornos, T.
    New search for: Svensson, B.G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Electrical Characterization of Nitrogen Implanted 3C-SiC by SSRM and C-TLM Measurements

    New search for: Song, X.
    New search for: Bazin, A.E.
    New search for: Michaud, J.F.
    New search for: Cayrel, F.
    New search for: Zielinski, M.
    New search for: Portail, M.
    New search for: Chassagne, T.
    New search for: Collard, E.
    New search for: Alquier, D.
    New search for: Monakhov, E.V.
    New search for: Hornos, T.
    New search for: Svensson, B.G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Electrical Characterization of Nitrogen Implanted 3C-SiC by SSRM and C-TLM Measurements

    New search for: Song, X.
    New search for: Bazin, A.E.
    New search for: Michaud, J.F.
    New search for: Cayrel, F.
    New search for: Zielinski, M.
    New search for: Portail, M.
    New search for: Chassagne, T.
    New search for: Collard, E.
    New search for: Alquier, D.
    New search for: Monakhov, E.V.
    New search for: Hornos, T.
    New search for: Svensson, B.G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Electrical Characterization of Nitrogen Implanted 3C-SiC by SSRM and C-TLM Measurements

    Contributors:

    Song, X. (author) / Bazin, A.E. (author) / Michaud, J.F. (author) / Cayrel, F. (author) / Zielinski, M. (author) / Portail, M. (author) / Chassagne, T. (author) / Collard, E. (author) / Alquier, D. (author) / Monakhov, E.V.

    Published in:

    Silicon Carbide and Related Materials 2010 ; 193-196

    MATERIALS SCIENCE FORUM ; 679/680

    Publication date:

    2011-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Scanning spreading resistance microscopy (SSRM) 2d carrier profiling for ultra-shallow junction characterization in deep-submicron technologies

    Eyben, P. / Janssens, T. / Vandervorst, W. | British Library Online Contents | 2005

    Qualitative doping area characterization of SONOS transistor utilizing scanning capacitance microscopy (SCM) and scanning spread resistance microscopy (SSRM)

    Heo, J. / Kim, D. / Kim, C. w. et al. | British Library Online Contents | 2005

    Application of SSRM in stability analysis of subgrade embankments over sloped weak ground with FLAC3D

    Jiang, X. / Qiu, Y. / Wei, Y. et al. | British Library Conference Proceedings | 2008

    Strain Measurements on Nitrogen Implanted 4H-SiC

    Amigou, M. / Beaufort, M.F. / Declemy, A. et al. | British Library Online Contents | 2011

    Characterization of nitrogen-implanted TiO2 nanostructured films

    Zhou, H. / Tesfamichael, T. / Bell, J. M. et al. | British Library Online Contents | 2006

    Back to top