Characterizations of NbAlO thin films grown by atomic layer deposition: Fid-Bau Portal

Characterizations of NbAlO thin films grown by atomic layer deposition

Liu, J. / Xu, Y. / Sun, Q. / Lu, H. / Zhang, D. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Characterizations of NbAlO thin films grown by atomic layer deposition

Liu, J. / Xu, Y. / Sun, Q. / Lu, H. / Zhang, D. W.

Characterizations of NbAlO thin films grown by atomic layer deposition

Liu, J. / Xu, Y. / Sun, Q. / Lu, H. / Zhang, D. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Characterizations of NbAlO thin films grown by atomic layer deposition

Contributors:

Liu, J. (author) / Xu, Y. (author) / Sun, Q. (author) / Lu, H. (author) / Zhang, D. W. (author)

Published in:

MATERIALS LETTERS ; 65 ; 2182-2184

Publication date:

2011-01-01

Size:

3 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

Dey, S. / Yun, S.J. | British Library Online Contents | 1999

SnO2 thin films grown by atomic layer deposition using a novel Sn precursor

Choi, M. J. / Cho, C. J. / Kim, K. C. et al. | British Library Online Contents | 2014

Perovskite Thin Films via Atomic Layer Deposition

Sutherland, B. R. / Hoogland, S. / Adachi, M. M. et al. | British Library Online Contents | 2015

Atomic layer deposition of PbZrO3 thin films

Harjuoja, J. / Vayrynen, S. / Putkonen, M. et al. | British Library Online Contents | 2007

Studies on polycrystalline ZnS thin films grown by atomic layer deposition for electroluminescent applications

Kim, Y. S. / Yun, S. J. | British Library Online Contents | 2004