SnO2 thin films grown by atomic layer deposition using a novel Sn precursor: Fid-Bau Portal

SnO2 thin films grown by atomic layer deposition using a novel Sn precursor

Choi, M. J. / Cho, C. J. / Kim, K. C. / Pyeon, J. J. / Park, H. H. / Kim, H. S. / Han, J. H. / Kim, C. G. / Chung, T. M. / Park, T. J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

SnO2 thin films grown by atomic layer deposition using a novel Sn precursor

Choi, M. J. / Cho, C. J. / Kim, K. C. / Pyeon, J. J. / Park, H. H. / Kim, H. S. / Han, J. H. / Kim, C. G. / Chung, T. M. / Park, T. J.

SnO2 thin films grown by atomic layer deposition using a novel Sn precursor

Choi, M. J. / Cho, C. J. / Kim, K. C. / Pyeon, J. J. / Park, H. H. / Kim, H. S. / Han, J. H. / Kim, C. G. / Chung, T. M. / Park, T. J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

SnO2 thin films grown by atomic layer deposition using a novel Sn precursor

Contributors:

Choi, M. J. (author) / Cho, C. J. (author) / Kim, K. C. (author) / Pyeon, J. J. (author) / Park, H. H. (author) / Kim, H. S. (author) / Han, J. H. (author) / Kim, C. G. (author) / Chung, T. M. (author) / Park, T. J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 320 ; 188-194

Publication date:

2014-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Liu, J. / Xu, Y. / Sun, Q. et al. | British Library Online Contents | 2011

Atomic/molecular layer deposition of hybrid inorganic–organic thin films from erbium guanidinate precursor

Mai, L. / Giedraityte, Z. / Schmidt, M. et al. | British Library Online Contents | 2017

AFM studies of polycrystalline calcium sulfide thin films grown by atomic layer deposition

Dey, S. / Yun, S.J. | British Library Online Contents | 1999

Perovskite Thin Films via Atomic Layer Deposition

Sutherland, B. R. / Hoogland, S. / Adachi, M. M. et al. | British Library Online Contents | 2015

Atomic layer deposition of PbZrO3 thin films

Harjuoja, J. / Vayrynen, S. / Putkonen, M. et al. | British Library Online Contents | 2007