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The uniformity of Al distribution in aluminum-doped zinc oxide films grown by atomic layer deposition

Luka, G. / Wachnicki, L. / Witkowski, B. S. / Krajewski, T. A. / Jakiela, R. / Guziewicz, E. / Godlewski, M.

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The uniformity of Al distribution in aluminum-doped zinc oxide films grown by atomic layer deposition

Luka, G. / Wachnicki, L. / Witkowski, B. S. / Krajewski, T. A. / Jakiela, R. / Guziewicz, E. / Godlewski, M.

The uniformity of Al distribution in aluminum-doped zinc oxide films grown by atomic layer deposition

Luka, G. / Wachnicki, L. / Witkowski, B. S. / Krajewski, T. A. / Jakiela, R. / Guziewicz, E. / Godlewski, M.

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Order at Subito €

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Document information

Title:

The uniformity of Al distribution in aluminum-doped zinc oxide films grown by atomic layer deposition

Contributors:

Luka, G. (author) / Wachnicki, L. (author) / Witkowski, B. S. (author) / Krajewski, T. A. (author) / Jakiela, R. (author) / Guziewicz, E. (author) / Godlewski, M. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 176 ; 237-241

Publication date:

2011-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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