Study of the effect of the deposition parameters on the structural, electric and optical characteristics of polymorphous silicon films prepared by low frequency PECVD: Fid-Bau Portal

Study of the effect of the deposition parameters on the structural, electric and optical characteristics of polymorphous silicon films prepared by low frequency PECVD

Moreno, M. / Torres, A. / Ambrosio, R. / Zuniga, C. / Torres-Rios, A. / Monfil, K. / Rosales, P. / Itzmoyotl, A.

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Study of the effect of the deposition parameters on the structural, electric and optical characteristics of polymorphous silicon films prepared by low frequency PECVD

Moreno, M. / Torres, A. / Ambrosio, R. / Zuniga, C. / Torres-Rios, A. / Monfil, K. / Rosales, P. / Itzmoyotl, A.

Study of the effect of the deposition parameters on the structural, electric and optical characteristics of polymorphous silicon films prepared by low frequency PECVD

Moreno, M. / Torres, A. / Ambrosio, R. / Zuniga, C. / Torres-Rios, A. / Monfil, K. / Rosales, P. / Itzmoyotl, A.

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Title:

Study of the effect of the deposition parameters on the structural, electric and optical characteristics of polymorphous silicon films prepared by low frequency PECVD

Contributors:

Moreno, M. (author) / Torres, A. (author) / Ambrosio, R. (author) / Zuniga, C. (author) / Torres-Rios, A. (author) / Monfil, K. (author) / Rosales, P. (author) / Itzmoyotl, A. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 176 ; 1373-1377

Publication date:

2011-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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