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Growth of Polymorphous/Nanocrystalline Silicon Films Deposited by PECVD at 13.56 MHz
Growth of Polymorphous/Nanocrystalline Silicon Films Deposited by PECVD at 13.56 MHz
Growth of Polymorphous/Nanocrystalline Silicon Films Deposited by PECVD at 13.56 MHz
Raniero, L. (author) / Martins, R. (author) / Aguas, H. (author) / Zang, S. (author) / Ferreira, I. (author) / Pereira, L. (author) / Fortunato, E. (author) / Boufendi, L. (author)
MATERIALS SCIENCE FORUM ; 455/456 ; 532-535
2004-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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