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    Composition, Structure and Optical Characteristics of Polymorphous Silicon Films Deposited by PECVD at 27.12 MHz

    New search for: Martins, R.
    New search for: Aguas, H.
    New search for: Ferreira, I.
    New search for: Fortunato, E.
    New search for: Raniero, L.
    New search for: Cabarrocas, P. R.

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    Composition, Structure and Optical Characteristics of Polymorphous Silicon Films Deposited by PECVD at 27.12 MHz

    New search for: Martins, R.
    New search for: Aguas, H.
    New search for: Ferreira, I.
    New search for: Fortunato, E.
    New search for: Raniero, L.
    New search for: Cabarrocas, P. R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Composition, Structure and Optical Characteristics of Polymorphous Silicon Films Deposited by PECVD at 27.12 MHz

    New search for: Martins, R.
    New search for: Aguas, H.
    New search for: Ferreira, I.
    New search for: Fortunato, E.
    New search for: Raniero, L.
    New search for: Cabarrocas, P. R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Composition, Structure and Optical Characteristics of Polymorphous Silicon Films Deposited by PECVD at 27.12 MHz

    Contributors:

    Martins, R. (author) / Aguas, H. (author) / Ferreira, I. (author) / Fortunato, E. (author) / Raniero, L. (author) / Cabarrocas, P. R. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 455/456 ; 100-103

    Publication date:

    2004-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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