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Study of nickel silicide formation on Si(110) substrate

Guo, X. / Yu, H. / Jiang, Y. L. / Ru, G. P. / Zhang, D. W. / Li, B. Z.

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Study of nickel silicide formation on Si(110) substrate

Guo, X. / Yu, H. / Jiang, Y. L. / Ru, G. P. / Zhang, D. W. / Li, B. Z.

Study of nickel silicide formation on Si(110) substrate

Guo, X. / Yu, H. / Jiang, Y. L. / Ru, G. P. / Zhang, D. W. / Li, B. Z.

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Order at Subito €

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Document information

Title:

Study of nickel silicide formation on Si(110) substrate

Contributors:

Guo, X. (author) / Yu, H. (author) / Jiang, Y. L. (author) / Ru, G. P. (author) / Zhang, D. W. (author) / Li, B. Z. (author)

Published in:

APPLIED SURFACE SCIENCE ; 257 ; 10571-10575

Publication date:

2011-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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