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A platform for research: civil engineering, architecture and urbanism
Low Cost Fabrication of Micro Glass Cavities For MEMS Wafer Level and Hermetic Packaging
Low Cost Fabrication of Micro Glass Cavities For MEMS Wafer Level and Hermetic Packaging
Low Cost Fabrication of Micro Glass Cavities For MEMS Wafer Level and Hermetic Packaging
Shang, J.T. (author) / Liu, J.W. (author) / Zhang, D. (author) / Chen, B.Y. (author) / Xu, C. (author) / Luo, X.H. (author) / Yu, H. (author) / Liu, J.D. (author) / Huang, Q.A. (author) / Tang, J.Y. (author)
KEY ENGINEERING MATERIALS ; 483 ; 23-33
2011-01-01
11 pages
Article (Journal)
English
DDC:
620.11
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