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A Monolithic MEMS Accelerometer Process
A Monolithic MEMS Accelerometer Process
A Monolithic MEMS Accelerometer Process
Li, X.G. (Autor:in) / Mei, Y. (Autor:in) / Huang, W.G. (Autor:in) / Zhang, Z.Y. (Autor:in) / Li, J.G. (Autor:in) / Feng, Z.C. (Autor:in)
KEY ENGINEERING MATERIALS ; 483 ; 70-74
01.01.2011
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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