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    Study on Parameters of MEMS Accelerometer

    New search for: Ma, S.M.
    New search for: Chen, C.
    New search for: Wang, T.
    New search for: Zhang, H.
    New search for: Zhou, H.X.
    New search for: Zhang, C.
    New search for: Zhang, L.

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    Study on Parameters of MEMS Accelerometer

    New search for: Ma, S.M.
    New search for: Chen, C.
    New search for: Wang, T.
    New search for: Zhang, H.
    New search for: Zhou, H.X.
    New search for: Zhang, C.
    New search for: Zhang, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Study on Parameters of MEMS Accelerometer

    New search for: Ma, S.M.
    New search for: Chen, C.
    New search for: Wang, T.
    New search for: Zhang, H.
    New search for: Zhou, H.X.
    New search for: Zhang, C.
    New search for: Zhang, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Study on Parameters of MEMS Accelerometer

    Contributors:

    Ma, S.M. (author) / Chen, C. (author) / Wang, T. (author) / Zhang, H. (author) / Zhou, H.X. (author) / Zhang, C. / Zhang, L.

    Published in:

    Materials Science and Nanotechnology I ; 496-499

    KEY ENGINEERING MATERIALS ; 531/532

    Publication date:

    2013-01-01

    Size:

    4 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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