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    IC-Compatible Polysilicon Surface Micromachining

    New search for: Sniegowski, J. J.
    New search for: de Boer, M. P.

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    IC-Compatible Polysilicon Surface Micromachining

    New search for: Sniegowski, J. J.
    New search for: de Boer, M. P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    IC-Compatible Polysilicon Surface Micromachining

    New search for: Sniegowski, J. J.
    New search for: de Boer, M. P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    IC-Compatible Polysilicon Surface Micromachining

    Contributors:

    Sniegowski, J. J. (author) / de Boer, M. P. (author)

    Published in:

    ANNUAL REVIEW OF MATERIALS SCIENCE ; 30 ; 299-333

    Publication date:

    2000-01-01

    Size:

    35 pages

    ISSN:

    0084-6600

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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