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    Study of a Capacitive Clamped Beam RF MEMS Power Sensor Based on MEMS Technology

    New search for: Zhu, Z.
    New search for: Liao, X.P.
    New search for: Hua, D.

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    Study of a Capacitive Clamped Beam RF MEMS Power Sensor Based on MEMS Technology

    New search for: Zhu, Z.
    New search for: Liao, X.P.
    New search for: Hua, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Study of a Capacitive Clamped Beam RF MEMS Power Sensor Based on MEMS Technology

    New search for: Zhu, Z.
    New search for: Liao, X.P.
    New search for: Hua, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Study of a Capacitive Clamped Beam RF MEMS Power Sensor Based on MEMS Technology

    Contributors:

    Zhu, Z. (author) / Liao, X.P. (author) / Hua, D. (author)

    Published in:

    KEY ENGINEERING MATERIALS ; 483 ; 503-507

    Publication date:

    2011-01-01

    Size:

    5 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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