Study on MEMS Capacitive Differential Pressure Sensor: Fid-Bau Portal

Study on MEMS Capacitive Differential Pressure Sensor

Hou, Z.H. / Huang, Z. / Jia, S.X.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Study on MEMS Capacitive Differential Pressure Sensor

Hou, Z.H. / Huang, Z. / Jia, S.X.

Study on MEMS Capacitive Differential Pressure Sensor

Hou, Z.H. / Huang, Z. / Jia, S.X.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Study on MEMS Capacitive Differential Pressure Sensor

Contributors:

Hou, Z.H. (author) / Huang, Z. (author) / Jia, S.X. (author) / Tang, F.

Published in:

MICRO-NANO TECHNOLOGY XV ; 968-971

KEY ENGINEERING MATERIALS ; 609/610

Publication date:

2014-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Zhu, Z. / Liao, X.P. / Hua, D. | British Library Online Contents | 2011

A SOI-MEMS Based Resonant Barometric Pressure Sensor with Differential Output

Luo, Z.Y. / Chen, D.Y. / Wang, J.B. | British Library Online Contents | 2014

Resonant capacitive MEMS acoustic emission transducers

Ozevin, D. / Greve, D. W. / Oppenheim, I. J. et al. | British Library Online Contents | 2006

A MEMS Capacitive Gyroscope with Improved Reliability

Liang, X.J. / Gao, S.Q. | British Library Online Contents | 2009

Capacitive pressure sensor and preparation method thereof

SHAO GANG / XIONG CHUNYUE / MA CHAO et al. | European Patent Office | 2023

Free access