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Piezoresistive Sensitivity and Al Ohmic Contact of Highly Doped Polycrystalline Silicon Nano Thin Films
Piezoresistive Sensitivity and Al Ohmic Contact of Highly Doped Polycrystalline Silicon Nano Thin Films
Piezoresistive Sensitivity and Al Ohmic Contact of Highly Doped Polycrystalline Silicon Nano Thin Films
Shi, C.Z. (author) / Liu, X.W. (author) / Wu, X. (author) / Zheng, H.T. (author)
KEY ENGINEERING MATERIALS ; 483 ; 789-794
2011-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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