Effect of substrate bias voltage on the structure, electric and dielectric properties of TiO2 thin films by DC magnetron sputtering: Fid-Bau Portal

Effect of substrate bias voltage on the structure, electric and dielectric properties of TiO2 thin films by DC magnetron sputtering

Chandra Sekhar, M. / Kondaiah, P. / Jagadeesh Chandra, S. V. / Mohan Rao, G. / Uthanna, S.

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Effect of substrate bias voltage on the structure, electric and dielectric properties of TiO2 thin films by DC magnetron sputtering

Chandra Sekhar, M. / Kondaiah, P. / Jagadeesh Chandra, S. V. / Mohan Rao, G. / Uthanna, S.

Effect of substrate bias voltage on the structure, electric and dielectric properties of TiO2 thin films by DC magnetron sputtering

Chandra Sekhar, M. / Kondaiah, P. / Jagadeesh Chandra, S. V. / Mohan Rao, G. / Uthanna, S.

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Title:

Effect of substrate bias voltage on the structure, electric and dielectric properties of TiO2 thin films by DC magnetron sputtering

Contributors:

Chandra Sekhar, M. (author) / Kondaiah, P. (author) / Jagadeesh Chandra, S. V. (author) / Mohan Rao, G. (author) / Uthanna, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 258 ; 1789-1796

Publication date:

2011-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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