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    Room temperature oxidation of magnetron sputtered Si-C-N films

    New search for: Huger, E.
    New search for: Gao, D.
    New search for: Markwitz, A.
    New search for: Geckle, U.
    New search for: Bruns, M.
    New search for: Schmidt, H.

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    Room temperature oxidation of magnetron sputtered Si-C-N films

    New search for: Huger, E.
    New search for: Gao, D.
    New search for: Markwitz, A.
    New search for: Geckle, U.
    New search for: Bruns, M.
    New search for: Schmidt, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Room temperature oxidation of magnetron sputtered Si-C-N films

    New search for: Huger, E.
    New search for: Gao, D.
    New search for: Markwitz, A.
    New search for: Geckle, U.
    New search for: Bruns, M.
    New search for: Schmidt, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Room temperature oxidation of magnetron sputtered Si-C-N films

    Contributors:

    Huger, E. (author) / Gao, D. (author) / Markwitz, A. (author) / Geckle, U. (author) / Bruns, M. (author) / Schmidt, H. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 258 ; 2944-2947

    Publication date:

    2012-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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