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Interfacial layers in Ta2O5 based stacks and constituent depth profiles by spectroscopic ellipsometry
Interfacial layers in Ta2O5 based stacks and constituent depth profiles by spectroscopic ellipsometry
Interfacial layers in Ta2O5 based stacks and constituent depth profiles by spectroscopic ellipsometry
Karmakov, Y. (author) / Paskaleva, A. (author) / Atanassova, E. (author)
APPLIED SURFACE SCIENCE ; 258 ; 4507-4512
2012-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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