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Prediction of surface and adhesion energies of nanoimprint lithography materials and anti-sticking layers by molecular dynamics simulation

Kang, J. H. / Kim, K. S. / Kim, K. W.

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Prediction of surface and adhesion energies of nanoimprint lithography materials and anti-sticking layers by molecular dynamics simulation

Kang, J. H. / Kim, K. S. / Kim, K. W.

Prediction of surface and adhesion energies of nanoimprint lithography materials and anti-sticking layers by molecular dynamics simulation

Kang, J. H. / Kim, K. S. / Kim, K. W.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Prediction of surface and adhesion energies of nanoimprint lithography materials and anti-sticking layers by molecular dynamics simulation

Contributors:

Kang, J. H. (author) / Kim, K. S. (author) / Kim, K. W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 258 ; 5438-5442

Publication date:

2012-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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