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Grain-scale growth simulation of SiC film with the Chemical Vapor Deposition method

Liu, C. / Yang, Y. / Luo, X.

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Grain-scale growth simulation of SiC film with the Chemical Vapor Deposition method

Liu, C. / Yang, Y. / Luo, X.

Grain-scale growth simulation of SiC film with the Chemical Vapor Deposition method

Liu, C. / Yang, Y. / Luo, X.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Grain-scale growth simulation of SiC film with the Chemical Vapor Deposition method

Contributors:

Liu, C. (author) / Yang, Y. (author) / Luo, X. (author)

Published in:

COMPUTATIONAL MATERIALS SCIENCE ; 59 ; 128-132

Publication date:

2012-01-01

Size:

5 pages

ISSN:

0927-0256

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 510

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