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    Atomic scale microstructures of high-k HfSiO thin films fabricated by magnetron sputtering

    New search for: Talbot, E.
    New search for: Roussel, M.
    New search for: Khomenkova, L.
    New search for: Gourbilleau, F.
    New search for: Pareige, P.

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    Atomic scale microstructures of high-k HfSiO thin films fabricated by magnetron sputtering

    New search for: Talbot, E.
    New search for: Roussel, M.
    New search for: Khomenkova, L.
    New search for: Gourbilleau, F.
    New search for: Pareige, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Atomic scale microstructures of high-k HfSiO thin films fabricated by magnetron sputtering

    New search for: Talbot, E.
    New search for: Roussel, M.
    New search for: Khomenkova, L.
    New search for: Gourbilleau, F.
    New search for: Pareige, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Atomic scale microstructures of high-k HfSiO thin films fabricated by magnetron sputtering

    Contributors:

    Talbot, E. (author) / Roussel, M. (author) / Khomenkova, L. (author) / Gourbilleau, F. (author) / Pareige, P. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 177 ; 717-720

    Publication date:

    2012-01-01

    Size:

    4 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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