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SIMS analysis of HfSiO(N) thin films

Miwa, S. / Kusanagi, S. / Kobayashi, H.

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SIMS analysis of HfSiO(N) thin films

Miwa, S. / Kusanagi, S. / Kobayashi, H.

SIMS analysis of HfSiO(N) thin films

Miwa, S. / Kusanagi, S. / Kobayashi, H.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

SIMS analysis of HfSiO(N) thin films

Contributors:

Miwa, S. (author) / Kusanagi, S. (author) / Kobayashi, H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 7176-7178

Publication date:

2006-01-01

Size:

3 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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