Ultra-violet light assisted reactive RF magnetron sputtering deposition of AlN thin films at room temperature: Fid-Bau Portal

Ultra-violet light assisted reactive RF magnetron sputtering deposition of AlN thin films at room temperature

Feng, B. / Dong, S. / Jin, H. / Zhou, J. / Yang, Y. / Ren, T. / Luo, J. / Wang, D.

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Ultra-violet light assisted reactive RF magnetron sputtering deposition of AlN thin films at room temperature

Feng, B. / Dong, S. / Jin, H. / Zhou, J. / Yang, Y. / Ren, T. / Luo, J. / Wang, D.

Ultra-violet light assisted reactive RF magnetron sputtering deposition of AlN thin films at room temperature

Feng, B. / Dong, S. / Jin, H. / Zhou, J. / Yang, Y. / Ren, T. / Luo, J. / Wang, D.

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Check availability in my library

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Document information

Title:

Ultra-violet light assisted reactive RF magnetron sputtering deposition of AlN thin films at room temperature

Contributors:

Feng, B. (author) / Dong, S. (author) / Jin, H. (author) / Zhou, J. (author) / Yang, Y. (author) / Ren, T. (author) / Luo, J. (author) / Wang, D. (author)

Published in:

MATERIALS LETTERS ; 79 ; 25-28

Publication date:

2012-01-01

Size:

4 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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