Flexible Control of Block Copolymer Directed Self-Assembly using Small, Topographical Templates: Potential Lithography Solution for Integrated Circuit Contact Hole Patterning: Fid-Bau Portal

Flexible Control of Block Copolymer Directed Self-Assembly using Small, Topographical Templates: Potential Lithography Solution for Integrated Circuit Contact Hole Patterning

Yi, H. / Bao, X. Y. / Zhang, J. / Bencher, C. / Chang, L. W. / Chen, X. / Tiberio, R. / Conway, J. / Dai, H. / Chen, Y.

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Flexible Control of Block Copolymer Directed Self-Assembly using Small, Topographical Templates: Potential Lithography Solution for Integrated Circuit Contact Hole Patterning

Yi, H. / Bao, X. Y. / Zhang, J. / Bencher, C. / Chang, L. W. / Chen, X. / Tiberio, R. / Conway, J. / Dai, H. / Chen, Y.

Flexible Control of Block Copolymer Directed Self-Assembly using Small, Topographical Templates: Potential Lithography Solution for Integrated Circuit Contact Hole Patterning

Yi, H. / Bao, X. Y. / Zhang, J. / Bencher, C. / Chang, L. W. / Chen, X. / Tiberio, R. / Conway, J. / Dai, H. / Chen, Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

Title:

Flexible Control of Block Copolymer Directed Self-Assembly using Small, Topographical Templates: Potential Lithography Solution for Integrated Circuit Contact Hole Patterning

Contributors:

Yi, H. (author) / Bao, X. Y. (author) / Zhang, J. (author) / Bencher, C. (author) / Chang, L. W. (author) / Chen, X. (author) / Tiberio, R. (author) / Conway, J. (author) / Dai, H. (author) / Chen, Y. (author)