Template Patterning: Flexible Control of Block Copolymer Directed Self-Assembly using Small, Topographical Templates: Potential Lithography Solution for Integrated Circuit Contact Hole Patterning (Adv. Mater. 23/2012): Fid-Bau Portal

Template Patterning: Flexible Control of Block Copolymer Directed Self-Assembly using Small, Topographical Templates: Potential Lithography Solution for Integrated Circuit Contact Hole Patterning (Adv. Mater. 23/2012)

Yi, H. / Bao, X. Y. / Zhang, J. / Bencher, C. / Chang, L. W. / Chen, X. / Tiberio, R. / Conway, J. / Dai, H. / Chen, Y.

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Yi, H. / Bao, X. Y. / Zhang, J. / Bencher, C. / Chang, L. W. / Chen, X. / Tiberio, R. / Conway, J. / Dai, H. / Chen, Y.

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Check availability in my library

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Document information

Title:

Contributors:

Yi, H. (author) / Bao, X. Y. (author) / Zhang, J. (author) / Bencher, C. (author) / Chang, L. W. (author) / Chen, X. (author) / Tiberio, R. (author) / Conway, J. (author) / Dai, H. (author) / Chen, Y. (author)

Published in:

ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 24 ; 3082-3082

Publication date:

2012-01-01

Size:

1 pages

ISSN:

0935-9648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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