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Template Patterning: Flexible Control of Block Copolymer Directed Self-Assembly using Small, Topographical Templates: Potential Lithography Solution for Integrated Circuit Contact Hole Patterning (Adv. Mater. 23/2012)
Template Patterning: Flexible Control of Block Copolymer Directed Self-Assembly using Small, Topographical Templates: Potential Lithography Solution for Integrated Circuit Contact Hole Patterning (Adv. Mater. 23/2012)
Template Patterning: Flexible Control of Block Copolymer Directed Self-Assembly using Small, Topographical Templates: Potential Lithography Solution for Integrated Circuit Contact Hole Patterning (Adv. Mater. 23/2012)
Yi, H. (author) / Bao, X. Y. (author) / Zhang, J. (author) / Bencher, C. (author) / Chang, L. W. (author) / Chen, X. (author) / Tiberio, R. (author) / Conway, J. (author) / Dai, H. (author) / Chen, Y. (author)
ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 24 ; 3082-3082
2012-01-01
1 pages
Article (Journal)
English
DDC:
620.11
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