Stress Evaluation on Hetero-Epitaxial 3C-SiC Films on (100) Si Substrates: Fid-Bau Portal

Stress Evaluation on Hetero-Epitaxial 3C-SiC Films on (100) Si Substrates

Anzalone, R. / Camarda, M. / Locke, C. / Carballo, J. / Piluso, N. / D Arrigo, G. / Severino, A. / Volinsky, A.A. / Saddow, S.E. / La Via, F.

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Stress Evaluation on Hetero-Epitaxial 3C-SiC Films on (100) Si Substrates

Anzalone, R. / Camarda, M. / Locke, C. / Carballo, J. / Piluso, N. / D Arrigo, G. / Severino, A. / Volinsky, A.A. / Saddow, S.E. / La Via, F.

Stress Evaluation on Hetero-Epitaxial 3C-SiC Films on (100) Si Substrates

Anzalone, R. / Camarda, M. / Locke, C. / Carballo, J. / Piluso, N. / D Arrigo, G. / Severino, A. / Volinsky, A.A. / Saddow, S.E. / La Via, F.

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Document information

Title:

Stress Evaluation on Hetero-Epitaxial 3C-SiC Films on (100) Si Substrates

Contributors:

Anzalone, R. (author) / Camarda, M. (author) / Locke, C. (author) / Carballo, J. (author) / Piluso, N. (author) / D Arrigo, G. (author) / Severino, A. (author) / Volinsky, A.A. (author) / Saddow, S.E. (author) / La Via, F. (author)

Published in:

MATERIALS SCIENCE FORUM ; 717/720 ; 521-524

Publication date:

2012-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Anzalone, R. / Locke, C. / Severino, A. et al. | British Library Online Contents | 2009

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Key Radicals for Hetero-Epitaxial Growth of 3C-SiC on Silicon Substrates

Shimizu, H. / Hisada, K. / Aoyama, Y. | British Library Online Contents | 2005

Hetero-Epitaxial Growth of 3C-SiC on Silicon Substrates by Plasma Assisted CVD

Shimizu, H. / Aoyama, Y. | British Library Online Contents | 2006

Raman Stress Characterization of Hetero-Epitaxial 3C-SiC Free Standing Structures

Piluso, N. / Camarda, M. / Anzalone, R. et al. | British Library Online Contents | 2011