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Residual Stress Measurement on Hetero-Epitaxial 3C-SiC Films

Anzalone, R. / Locke, C. / Severino, A. / Rodilosso, D. / Tringali, C. / Foti, G. / Saddow, S.E. / La Via, F. / D Arrigo, G.

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Residual Stress Measurement on Hetero-Epitaxial 3C-SiC Films

Anzalone, R. / Locke, C. / Severino, A. / Rodilosso, D. / Tringali, C. / Foti, G. / Saddow, S.E. / La Via, F. / D Arrigo, G.

Residual Stress Measurement on Hetero-Epitaxial 3C-SiC Films

Anzalone, R. / Locke, C. / Severino, A. / Rodilosso, D. / Tringali, C. / Foti, G. / Saddow, S.E. / La Via, F. / D Arrigo, G.

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Document information

Title:

Residual Stress Measurement on Hetero-Epitaxial 3C-SiC Films

Contributors:

Anzalone, R. (author) / Locke, C. (author) / Severino, A. (author) / Rodilosso, D. (author) / Tringali, C. (author) / Foti, G. (author) / Saddow, S.E. (author) / La Via, F. (author) / D Arrigo, G. (author)

Published in:

MATERIALS SCIENCE FORUM ; 615/617 ; 629-632

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Anzalone, R. / Camarda, M. / Auditore, A. et al. | British Library Online Contents | 2013

Stress Evaluation on Hetero-Epitaxial 3C-SiC Films on (100) Si Substrates

Anzalone, R. / Camarda, M. / Locke, C. et al. | British Library Online Contents | 2012

Raman Stress Characterization of Hetero-Epitaxial 3C-SiC Free Standing Structures

Piluso, N. / Camarda, M. / Anzalone, R. et al. | British Library Online Contents | 2011

A Study of Structural Defects in 3C-SiC Hetero-Epitaxial Films

Severino, A. / Anzalone, R. / Bongiorno, C. et al. | British Library Online Contents | 2010

Determining the Complete Residual Stress Tensors in SOS Hetero-Epitaxial Thin Film Systems by the Technique of X-Ray Diffraction

Liu, M. / Zhang, L.C. / Brawley, A. et al. | British Library Online Contents | 2010