Surface Phase Diagram of 4H-SiC {0001} Step-Terrace Structures during Si-Vapor Etching in a TaC Crucible: Fid-Bau Portal

Surface Phase Diagram of 4H-SiC {0001} Step-Terrace Structures during Si-Vapor Etching in a TaC Crucible

Ushio, S. / Karaki, T. / Hagiwara, K. / Ohtani, N. / Kaneko, T.

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Surface Phase Diagram of 4H-SiC {0001} Step-Terrace Structures during Si-Vapor Etching in a TaC Crucible

Ushio, S. / Karaki, T. / Hagiwara, K. / Ohtani, N. / Kaneko, T.

Surface Phase Diagram of 4H-SiC {0001} Step-Terrace Structures during Si-Vapor Etching in a TaC Crucible

Ushio, S. / Karaki, T. / Hagiwara, K. / Ohtani, N. / Kaneko, T.

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Title:

Surface Phase Diagram of 4H-SiC {0001} Step-Terrace Structures during Si-Vapor Etching in a TaC Crucible

Contributors:

Ushio, S. (author) / Karaki, T. (author) / Hagiwara, K. (author) / Ohtani, N. (author) / Kaneko, T. (author)

Published in:

MATERIALS SCIENCE FORUM ; 717/720 ; 573-576

Publication date:

2012-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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