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    Extended study of the atomic step-terrace structure on hexagonal SiC (0001) by chemical-mechanical planarization

    New search for: Shi, X.
    New search for: Pan, G.
    New search for: Zhou, Y.
    New search for: Zou, C.
    New search for: Gong, H.

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    Extended study of the atomic step-terrace structure on hexagonal SiC (0001) by chemical-mechanical planarization

    New search for: Shi, X.
    New search for: Pan, G.
    New search for: Zhou, Y.
    New search for: Zou, C.
    New search for: Gong, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Extended study of the atomic step-terrace structure on hexagonal SiC (0001) by chemical-mechanical planarization

    New search for: Shi, X.
    New search for: Pan, G.
    New search for: Zhou, Y.
    New search for: Zou, C.
    New search for: Gong, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Extended study of the atomic step-terrace structure on hexagonal SiC (0001) by chemical-mechanical planarization

    Contributors:

    Shi, X. (author) / Pan, G. (author) / Zhou, Y. (author) / Zou, C. (author) / Gong, H. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 284 ; 195-206

    Publication date:

    2013-01-01

    Size:

    12 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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