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    Shallow Incorporation of Nitrogen in HPSI 4H-SiC through the Laser Enhanced Diffusion Process

    New search for: Sullivan, W.W.
    New search for: Hettler, C.
    New search for: Dickens, J.

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    Shallow Incorporation of Nitrogen in HPSI 4H-SiC through the Laser Enhanced Diffusion Process

    New search for: Sullivan, W.W.
    New search for: Hettler, C.
    New search for: Dickens, J.

    Access

    Access via TIB
    Check availability in my library
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    Shallow Incorporation of Nitrogen in HPSI 4H-SiC through the Laser Enhanced Diffusion Process

    New search for: Sullivan, W.W.
    New search for: Hettler, C.
    New search for: Dickens, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    Shallow Incorporation of Nitrogen in HPSI 4H-SiC through the Laser Enhanced Diffusion Process

    Contributors:

    Sullivan, W.W. (author) / Hettler, C. (author) / Dickens, J. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 717/720 ; 813-816

    Publication date:

    2012-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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