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    Set of equations for transient enhanced diffusion in shallow ion-implanted layers

    New search for: Velichko, O. I.
    New search for: Shaman, Y. P.
    New search for: Fedotov, A. K.
    New search for: Masanik, A. V.

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    Set of equations for transient enhanced diffusion in shallow ion-implanted layers

    New search for: Velichko, O. I.
    New search for: Shaman, Y. P.
    New search for: Fedotov, A. K.
    New search for: Masanik, A. V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Set of equations for transient enhanced diffusion in shallow ion-implanted layers

    New search for: Velichko, O. I.
    New search for: Shaman, Y. P.
    New search for: Fedotov, A. K.
    New search for: Masanik, A. V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Set of equations for transient enhanced diffusion in shallow ion-implanted layers

    Contributors:

    Velichko, O. I. (author) / Shaman, Y. P. (author) / Fedotov, A. K. (author) / Masanik, A. V. (author)

    Published in:

    COMPUTATIONAL MATERIALS SCIENCE ; 43 ; 279-285

    Publication date:

    2008-01-01

    Size:

    7 pages

    ISSN:

    0927-0256

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1 / 510

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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