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    Nitrogen impurity incorporation behavior in a chimney HTCVD process: pressure and temperature dependence

    New search for: Zhang, J.
    New search for: Ellison, A.
    New search for: Henry, A.
    New search for: Linnarsson, M.K.
    New search for: Janzen, E.

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    Nitrogen impurity incorporation behavior in a chimney HTCVD process: pressure and temperature dependence

    New search for: Zhang, J.
    New search for: Ellison, A.
    New search for: Henry, A.
    New search for: Linnarsson, M.K.
    New search for: Janzen, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Nitrogen impurity incorporation behavior in a chimney HTCVD process: pressure and temperature dependence

    New search for: Zhang, J.
    New search for: Ellison, A.
    New search for: Henry, A.
    New search for: Linnarsson, M.K.
    New search for: Janzen, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Nitrogen impurity incorporation behavior in a chimney HTCVD process: pressure and temperature dependence

    Contributors:

    Zhang, J. (author) / Ellison, A. (author) / Henry, A. (author) / Linnarsson, M.K. (author) / Janzen, E. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 61-62 ; 151 - 154

    Publication date:

    1999-01-01

    Size:

    4 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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