Post-Implantation Annealing Effects on the Surface Morphology and Electrical Characteristics of 6H-SiC Implanted with Aluminum

Ohi, A. / Ohshima, T. / Yoshikawa, M. et al. | British Library Online Contents | 2002

Implantation and annealing studies of Tm-implanted GaN

Lorenz, K. / Alves, E. / Wahl, U. et al. | British Library Online Contents | 2003

Hydrogen redistribution and enhanced thermal donor formation at post implantation annealing of p-type hydrogen implanted Czochralski silicon

Ulyashin, A. G. / Ivanov, A. I. / Khorunzhii, I. A. et al. | British Library Online Contents | 1999

Microstructural Study of Fe-Implanted SiC: Comparison of Different Post-Implantation Treatments

Declemy, A. / Dupeyrat, C. / Thome, L. et al. | British Library Online Contents | 2009

Current Analysis of Ion Implanted p^+/n 4H-SiC Junctions: Post-Implantation Annealing in Ar Ambient

Nipoti, R. / Bergamini, F. / Moscatelli, F. et al. | British Library Online Contents | 2006