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Single Photolithography/Implantation 120-Zone Junction Termination Extension for High-Voltage SiC Devices
Single Photolithography/Implantation 120-Zone Junction Termination Extension for High-Voltage SiC Devices
Single Photolithography/Implantation 120-Zone Junction Termination Extension for High-Voltage SiC Devices
Snook, M. (author) / McNutt, T. (author) / Kirby, C. (author) / Hearne, H. (author) / Veliadis, V. (author) / Nechay, B. (author) / Woodruff, S. (author) / Howell, R.S. (author) / White, J. (author) / Davis, S. (author)
MATERIALS SCIENCE FORUM ; 717/720 ; 977-980
2012-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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