High Voltage SiC JBS Diodes with Multiple Zone Junction Termination Extension Using Single Etching Step: Fid-Bau Portal

High Voltage SiC JBS Diodes with Multiple Zone Junction Termination Extension Using Single Etching Step

Deng, X.C. / Rao, C.Y. / Wei, J. / Jiang, H.P. / Chen, M.M. / Wang, X.D. / Zhang, B.

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High Voltage SiC JBS Diodes with Multiple Zone Junction Termination Extension Using Single Etching Step

Deng, X.C. / Rao, C.Y. / Wei, J. / Jiang, H.P. / Chen, M.M. / Wang, X.D. / Zhang, B.

High Voltage SiC JBS Diodes with Multiple Zone Junction Termination Extension Using Single Etching Step

Deng, X.C. / Rao, C.Y. / Wei, J. / Jiang, H.P. / Chen, M.M. / Wang, X.D. / Zhang, B.

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Check availability in my library

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Document information

Title:

High Voltage SiC JBS Diodes with Multiple Zone Junction Termination Extension Using Single Etching Step

Contributors:

Deng, X.C. (author) / Rao, C.Y. (author) / Wei, J. (author) / Jiang, H.P. (author) / Chen, M.M. (author) / Wang, X.D. (author) / Zhang, B. (author) / Okumura, H. / Harima, H. / Kimoto, T.

Published in:

Silicon Carbide and Related Materials 2013 ; 808-811

MATERIALS SCIENCE FORUM ; 778/780

Publication date:

2014-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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