Imaging and Strain Analysis of Threading-Edge and Basal-Plane Dislocations in 4H-SiC Using X-Ray Three-Dimensional Topography: Fid-Bau Portal

Imaging and Strain Analysis of Threading-Edge and Basal-Plane Dislocations in 4H-SiC Using X-Ray Three-Dimensional Topography

Tanuma, R. / Mori, D. / Kamata, I. / Tsuchida, H.

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Imaging and Strain Analysis of Threading-Edge and Basal-Plane Dislocations in 4H-SiC Using X-Ray Three-Dimensional Topography

Tanuma, R. / Mori, D. / Kamata, I. / Tsuchida, H.

Imaging and Strain Analysis of Threading-Edge and Basal-Plane Dislocations in 4H-SiC Using X-Ray Three-Dimensional Topography

Tanuma, R. / Mori, D. / Kamata, I. / Tsuchida, H.

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Check availability in my library

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Document information

Title:

Imaging and Strain Analysis of Threading-Edge and Basal-Plane Dislocations in 4H-SiC Using X-Ray Three-Dimensional Topography

Contributors:

Tanuma, R. (author) / Mori, D. (author) / Kamata, I. (author) / Tsuchida, H. (author) / Yamada-Kaneta, H. / Sakai, A.

Published in:

Defects-Recognition, Imaging and Physics in Semiconductors XIV ; 3-6

MATERIALS SCIENCE FORUM ; 725

Publication date:

2012-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Tanuma, R. / Mori, D. / Kamata, I. et al. | British Library Online Contents | 2012

Characterization of Basal Plane Dislocations in 4H-SiC Substrates by Topography Analysis of Threading Edge Dislocations in Epilayers

Kamata, I. / Nagano, M. / Tsuchida, H. | British Library Online Contents | 2010

Why are Only Some Basal Plane Dislocations Converted to Threading Edge Dislocations during SiC Epitaxy?

Zhang, Z. H. / Shrivastava, A. / Sudarshan, T. S. | British Library Online Contents | 2006

Contrast of Basal Plane and Threading Edge Dislocations in 4H-SiC by X-Ray Topography in Grazing Incidence Geometry

Matsuhata, H. / Yamaguchi, H. / Nagai, I. et al. | British Library Online Contents | 2009

Conversion of Basal Plane Dislocations to Threading Edge Dislocations by Annealing 4H-SiC Epilayers at High Temperatures

Zhang, X. / Nagano, M. / Tsuchida, H. | British Library Online Contents | 2013