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    Structural investigation of nC-Si/SiOx:H thin films from He diluted (SiH4+CO2) plasma at low temperature

    New search for: Samanta, A.
    New search for: Das, D.

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    Structural investigation of nC-Si/SiOx:H thin films from He diluted (SiH4+CO2) plasma at low temperature

    New search for: Samanta, A.
    New search for: Das, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Structural investigation of nC-Si/SiOx:H thin films from He diluted (SiH4+CO2) plasma at low temperature

    New search for: Samanta, A.
    New search for: Das, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Structural investigation of nC-Si/SiOx:H thin films from He diluted (SiH4+CO2) plasma at low temperature

    Contributors:

    Samanta, A. (author) / Das, D. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 259 ; 477-485

    Publication date:

    2012-01-01

    Size:

    9 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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